Events

R. G. Herb Condensed Matter Seminars

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Events During the Week of June 5th through June 12th, 2022

Monday, June 6th, 2022

Better Qubits with ALD and ALE
Time: 11:00 am - 1:00 pm
Place: Chamberlin 5310
Speaker: Dr. Russ Renzas, Oxford Instrumetns
Abstract: Quantum device losses are predominantly from surfaces and interfaces. Atomic layer deposition (ALD) enables tuneable low loss materials, such as superconducting nitrides with engineered crystallinity. Isotropic and anisotropic ALE are two distinct techniques which can each prepare and repair surfaces by removing native oxides prior to deposition or removing subsurface damage from RIE-induced subsurface amorphization and etchant incorporation. Isotropic ALE and ALD can also be combined in-situ to engineer interfaces prior to deposition and modify films. This talk will introduce these techniques through the lens of potential use cases in superconducting, photonic, and color center quantum device fabrication.
Host: Robert McDermott
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Tuesday, June 7th, 2022

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Wednesday, June 8th, 2022

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Thursday, June 9th, 2022

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Friday, June 10th, 2022

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